授课教师：Xiaohong Tang

国籍：Republic of Singapore

职称：副教授

教师简介（中英文）：

汤小泓，IEEE资深会员，现在为南洋理工大学终身教席副教授，长期从事半导体微纳米结构、半导体外延和半导体光电器件的研究工作。他在南洋理工大学率先主持建立了金属有机气相外延工艺，成功研制出各类高质量化合半导体材料：半导体量子阱、量子线和量子点等纳米结构、大功率半导体激光阵列，成功应用于微电子、光电子、材料工程、量子信息、通讯技术等前沿领域，发表了超过160篇高水平学术论文。他在南洋理工大学负责包括《Microfabrication Engineering》在内等6门课程的讲授工作，授课经验丰富，讲解方式通俗易懂。

Prof. Tang Xiaohong is a Senior Member of IEEE and works in Nanyang Technological University (NTU),Singapore. He is now a tenured Associate Professor of the School of Electrical and Electronic Engineering, NTU. Prof.Tang’s researches focus on compound semiconductor nanostructures, semiconductor epitaxy growths and semiconductor optoelectronic devices. He has led to develop the first MOCVD epitaxy growth technology in NTU. His team has successfully grown varies high varies III-V compound semiconductors, semiconductor nanostructures, such as quantum wells, semiconductor nanowires and semiconductor quantum dots. They have also developed high performance semiconductor laser arrays. Prof. Tang is the coordinator of 6 courses, including the course “Microfabrication Engineering”.

课程简介（中英文）：本课程旨在为学生讲授有关半导体微纳制造技术与原理、制造系统和操作的基础知识。通过该课程的学习，学生可以全面了解半导体微纳制造的相关原理和发展前沿，掌握半导体微纳制造的基础概念与方法，为学生未来在研究生涯中如何做好科学研究提供重要的基础知识。

This course aims to provide students with fundamental knowledge of various semiconductor wafer fabrication technologies, their principles, systems and operations. The students will learn the basic the concepts and operation of semiconductor single crystal growth technology, including vacuum technology, thermal annealing, etc. The knowledge the students learnt in this course will enable them to gain a strong understanding of various technologies of semiconductor, which are widely used but not limited in microelectronics.