A step-by-step experiment of 3C-SiC hetero-epitaxial growth on 4H-SiC by CVD
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Affiliation of Author(s):微电子学院
Affiliation of Author(s):微电子学院
Title of Paper:A step-by-step experiment of 3C-SiC hetero-epitaxial growth on 4H-SiC by CVD
Title of Paper:A step-by-step experiment of 3C-SiC hetero-epitaxial growth on 4H-SiC by CVD
Journal:APPLIED SURFACE SCIENCE
Journal:APPLIED SURFACE SCIENCE
First Author:Xin, Bin; Jia, Ren-Xu; Hu, Ji-Chao; Tsai, Cheng-Ying; Lin, Hao-Hsiung; Zhang, Yu-Ming
Indexed by:Article
Document Code:SCI WOS:000366216900129