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一种面向三维集成电路无冗余TSV的编码分级修复方法

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Disigner of the Invention:张军琴,宋仁浩,朱占旗,单光宝,李国良,杨银堂

Type of Patent:Invent

State of Patent:Authorized patents

Authorization number:CN202310449803.4

Service Invention or Not:no

Authorization Date:2023-06-02

Pre One:基于二硫化钼/锗异质结的PIN型光电探测器及其制备方法

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