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基于P型GaN漏电隔离层的同质外延氮化镓高电子迁移率晶体管及制作方法

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Affilication of Author(s):微电子学院

Patent Coverage:国内

Type of Patent:发明

Application Number:CN202110826341.4

Authorization number:CN202110826341.4

Number of Inventors:10

Service Invention or Not:no

Application Date:2021-07-21

Authorization Date:2022-12-02

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