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喷淋蚀刻系统

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First Author:王秋旺

Disigner of the Invention:辛菲,马挺,李雄辉,邓天瑞

Type of Patent:Invent

State of Patent:Authorized patents

Authorization number:ZL201711153828.0

Number of Inventors:5

Service Invention or Not:no

Authorization Date:2019-04-02

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