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深亚微米栅长AlGaN/GaNHEMT制作方法

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Affilication of Author(s):100900

Teaching and Research Group:1114

Patent Coverage:1

Type of Patent:1

Application Number:201110282236.5

Number of Inventors:6

Service Invention or Not:no

Application Date:2011-09-21

Authorization Date:2013-04-03

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