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原位SiN帽层AlGaN/GaN异质结增强型器件及其制作方法

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Affilication of Author(s):100900

Teaching and Research Group:1114

Patent Coverage:1

Type of Patent:1

Application Number:201210476552

Number of Inventors:6

Service Invention or Not:no

Application Date:2012-11-21

Pre One:AlGaN/GaN异质结增强型器件及其制作方法

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