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a面GaN外延层薄膜腐蚀应力的拉曼表征方法

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Affilication of Author(s):100900

Teaching and Research Group:2101

Patent Coverage:1

Type of Patent:1

Application Number:201110293524

Number of Inventors:11

Service Invention or Not:no

Application Date:2011-10-02

Authorization Date:2013-06-12

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