VLSI互连电迁移失效的多参量表征方法
Hits:
Leading Scientist:杜磊
Status:已结题
Supported by:国家自然科学基金委员会
Supported by:National Natural Science Foundation of China (NSFC)
Project level:National
Project Participants:何亮
Project Number:60376023
Classification of Disciplines:Engineering
Date of Project Approval:2004-01-01
Date of Project Completion:2006-12-31
Date of Project Initiation:2004-01-01