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一种基于TSV阵列的滤波器及其TSV阵列的设计方法

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Affilication of Author(s):微电子学院

First Author:guangbao shan

Type of Patent:发明

Application Number:CN202310460568.0

Authorization number:CN202310460568.0

Service Invention or Not:no

Authorization Date:2023-04-26

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