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集成FEM和ANFIS的硅通孔阵列峰值温度快速预测方法及系统

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Affilication of Author(s):微电子学院

Patent Coverage:国内

Type of Patent:发明

Application Number:CN202111120059.0

Authorization number:CN202111120059.0

Service Invention or Not:no

Authorization Date:2021-09-24

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