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Affiliation of Author(s):西安电子科技大学-机电工程学院

Title of Paper:Analysis and test of a new MEMS micro-actuator

Journal:Microsystem Technologies

First Author:Wenchao Tian, Zhiqiang Chen, Yanrong Cao

Indexed by:Journal paper

Discipline:Engineering

First-Level Discipline:Mechanical Engineering

Document Type:J

Volume:22

Issue:1

Page Number:943-952

Translation or Not:no

Date of Publication:2016-01-07