微尺度表面粗糙度动态演化机理及其对射频MEMS开关可靠性影响研究

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Affiliation of Participant(s):西安电子科技大学-机电工程学院

Leading Scientist:陈志强

Status:在研

Supported by:国家自然科学基金委员会

Type of Research Outcome:Theoretical research results

Classification of Project:National Natural Science Foundation

Sub-Class of Project:Young science foundation project

Type of Project:基础研究

Nature of Project:纵向

Supported by:National Natural Science Foundation of China (NSFC)

Project level:National

Classification of Disciplines:Engineering

First-Level Discipline:Mechanical Engineering

Date of Project Approval:2022-01-01

Scheduled completion time:2024-12-31

Date of Project Completion:2024-12-31

Date of Project Initiation:2022-01-01

Project Approval Number:62104181

Pre One:基于柔性传感器的城市供水管道泄漏检测和定位方法研究

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