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Title of Achievement:基于BNT和SMP的大变形、低电压和快响应MEMS驱动器研究

Order of Affiliations of Authors:1

Granted by:陕西省教育厅

School Sign:第一

Primary Participant:田文超、王永坤、时婧、陈志强

Type of Outcome:Theoretical research results

Level of Award:Province/ city

Grade of Award:Second prize

Type of Award:National Prize for Natural Sciences

Date of Award:2023-04-20

Number of Participants:4